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Megasonic Cleaning Systems

(2)

Material

Housing: PEEK, PCTFE

Housing: PVC

Applicable Wafer Size

12”

6”

8”

Flow Rate

>0.9 L/min

Megasonic Cleaning Systems

2products

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espro

Megasonic Plate

ESPRO-MP-Series

Megasonic Cleaning Systems

ESPRO

Megasonic Plate

6”, 8”, 12”

espro

Megasonic Nozzle - Shower Type

ESPRO-MS-Series

Megasonic Cleaning Systems

ESPRO

Megasonic Nozzle - Shower Type

>0.9 L/min