Inline Heaters

Create your own esPRO^® Inline Heater!
With 4 weeks delivery time

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Flowmeters and sensors

Designed for effective non-contact, non-invasive flow rate measurement!
Easy to install for any user

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Filtration

Specialized filters for water, chemicals, slurry, and gas purification
Superior purity, safety, and performance, meet stringent industry standards

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EXPERIENCE THE esPRO^® DIFFERENCE

We are dedicated to driving your everyday wet processes forward. With high-end, ultra-pure materials and cutting-edge innovations, esPRO^® products are designed to meet the high demands of modern clean rooms. With decades of experience in the semiconductor industry, we deliver the technology, quality, and performance you need to achieve your process goals.

SERVICES

Refurbish your existing tool? Finding the right part? Dedication towards our customers and flexibility in finding the right solution, combined with application knowledge and fast supply logistics.

PRODUCTS

Fast supply or from stock? We have a short-lead time approach to manufacturing. Most of our products have a 2-4 week lead time or are available or from stock.

CUSTOM SOLUTIONS

In addition to our standard products, we also offer customized solutions for esPRO^® filters, heaters, pumps, flow meters, CMP solutions, refurbs and more.

Design your own heater

Heating liquids in ultra-pure environments can be a challenge. What if you could design your own heater? Build your perfect heater with our esPRO^® heater line to seamlessly match your needs and application, now and in the future. Of course, we have a few standard configurations set for our heaters. However, most ultra-pure wet process installations are not standard. So we have created a modular set up for our heaters, making them fit anywhere in your installation.

Advanced filter solutions

We are proud to offer specialized filters for water, chemicals, slurry, and gas purification. Our filters are crafted with ultra-high purity raw materials, ensuring exceptional performance and reliability in the most demanding environments. Customizations are also no issue: whether you require pre-wetted filters, customized media porosity, or enhanced flow characteristics, our team of experts will work with you to develop the perfect solution.

Spray acid tool

A Spray Acid Tool is designed for batch wafer processing for acid etch or clean processes up to 300 mm wafers. What SAT brands can be refurbished? Semitool, Siconnex, Ramgraber and Rhetech.