Inline Heaters
Create your own esPRO® Inline Heater!
With 4 weeks delivery time
Flowmeters and sensors
Designed for effective non-contact, non-invasive flow rate measurement!
Easy to install for any user
Filtration
Specialized filters for water, chemicals, slurry, and gas purification
Superior purity, safety, and performance, meet stringent industry standards
Slurry enhancement
Saves slurry and reduce dishing-erosion and defects
Can be integrated on any CMP tool or used as a stand-alone system
SERVICES
Refurbish your existing tool? Finding the right part? Dedication towards our customers and flexibility in finding the right solution, combined with application knowledge and fast supply logistics.
PRODUCTS
Fast supply or from stock? We have a short-lead time approach to manufacturing. Most of our products have a 2-4 week lead time or are available or from stock.
CUSTOM SOLUTIONS
In addition to our standard products, we also offer customized solutions for esPRO® filters, heaters, pumps, flow meters, CMP solutions, refurbs and more.
Design your own heater
Heating liquids in ultra-pure environments can be a challenge. What if you could design your own heater? Build your perfect heater with our esPRO® heater line to seamlessly match your needs and application, now and in the future. Of course, we have a few standard configurations set for our heaters. However, most ultra-pure wet process installations are not standard. So we have created a modular set up for our heaters, making them fit anywhere in your installation.
Advanced filter solutions
Heating liquids in ultra-pure environments can be a challenge. What if you could design your own heater? Build your perfect heater with our esPRO® heater line to seamlessly match your needs and application, now and in the future. Of course, we have a few standard configurations set for our heaters. However, most ultra-pure wet process installations are not standard. So we have created a modular set up for our heaters, making them fit anywhere in your installation.
Spray acid tool
A Spray Acid Tool is designed for batch wafer processing for acid etch or clean processes up to 300 mm wafers. What SAT brands can be refurbished? Semitool, Siconnex, Ramgraber and Rhetech.
Upcoming exhibitions & meetings
In the coming period you can find us at the following exhibitions & meetings.
View exhibitions