esPRO’s CFCME Series CMP Capsule Filter is designed specifically for CMP (Chemical Mechanical Planarization) applications, offering superior filtration of impurities and gels in CMP slurry. The CFCME filter utilizes a unique and patented polypropylene spin nano fiber media, which provides advanced gradient filtration, extending the filter’s service life by effectively capturing a wide range of particle sizes.
The CFCME series features a compact structure for easy operation, making it ideal for use in confined or space-sensitive systems. Constructed with an all-polypropylene (PP) shell, this filter series is assembled using a hot-melt welding process, eliminating the need for adhesives and ensuring clean, reliable filtration.
Measuring 206mm in length, the CFCME capsule filters are designed to handle high-performance filtration tasks while maintaining a small footprint. They are capable of operating at temperatures up to 55ºC and can withstand a maximum differential pressure of 0.6 MPa, making them suitable for high-pressure CMP processes.
With its patented nano fiber technology and advanced filtration capabilities, the CFCME Series CMP Capsule Filters provide a reliable and efficient solution for industries requiring the highest levels of cleanliness in CMP slurry filtration. These filters ensure optimal performance and longevity in even the most demanding applications.