Ultra high-purity chemical pump for the semiconductor industry.

Model: SEMI T
Materials: center housing PTFE-TFM; side housings UPPE/PA
Pump sizes: 10, 20, 50, 100
Products: acids and caustics

The pumps from our SEMI DMS series have been designed especially for the purpose of semiconductor industry. The whole assembly process of these unique products is completed in a CLASS 100 CLEAN ROOM, involving a double cleaning of the parts, their testing with deionized water, and finally sealing in plastic foils.

FEATURES

• No metal parts SEMI T, H and E
• No elastomeric O-rings
• Lubrication-free air motor
• Cleanroom Class 100 assembled, tested with de-ionized water and double packaged
• Durable TFM diaphragms, for extended flex life
• Four materials for different applications with max. temp. 200°C
• Machined from solid material on a very highly advanced CNC Machining and Turning Centre controls and monitoring available for all sizes
• Very easy repairing, just 40% spares comparing pulsation dampers, leak detection, electronic/pneumatic