The esPRO® Heat Exchanger provides precise and reliable temperature control of chemical solutions. It ensures that chemical baths, such as etching or cleaning solutions, remain at a constant temperature essential for maintaining uniformity and quality of the wafers.
Its multitube design increases thermal efficiency, enabling fast heat exchange between the process fluids and cooling/heating mediums. Its compact design saves space and integrates seamlessly with existing wet process equipment.
The esPRO® Heat exchanger consists of highpurity fluorocarbon polymers making it longlasting and resistant to most liquid chemicals. It also features superior non-adhesiveness, ensuring that almost no staining or scaling occurs on this product and high thermal efficiency can be maintained. The connector is all made of fluorocarbon polymers by means of fusion bonding.
Key benefits
- Applicable for almost all chemicals
- High cleanliness and compact design
- High thermal efficiency
- High-purity PFA tubing with NPP housing
