Quartz boats are used for processing wafers in a diffusion furnace or oxidation furnace. These quartz boats have a particularly high demand on purity and temperature resistance of the material from which they are made. The manufacturing of these Quartz boats requires individual components such as rods and plates made of high purity quartz glass. We have welding fixtures and slot cutting patterns for well over 50 different types and variations of Quartz boats. We can provide services from repairing Quartz parts through fire repair to manufacturing the product itself.
In close cooperation with our customers, we will develop the quartz boat needed for their process as well as other individual solutions.