CMP Process Training - Module 9:
Diamond and CVD discs for pad conditioning
- ILD polish rate decay
- Pad surface micro-texture evolution as a result of polishing and conditioning
- Characterization of active and aggressive diamonds
- The study of furrows cut in the pad as a result of conditioning
- Conditioning, conditioner wear and RR performance
- Pad debris and fragments from conditioning
- Particulate generation
- Issues re: disc size and platen size
- Conditioning recipe optimization