CMP Process Training - Module 4:
Bulk polishing theory with the goal to apply a proper model for oxide and metal polish
- Examples of ILD and metal polishing data
- Preston plots vs. contour (Lim-Ashby) plots
- High-level derivation and application of a simple tribochemical model
- Mechanically-limited and chemically-limited extremes of the model
- Heat transfer to contacting summits and the definition of “flash heating”
- Analytical estimate of contacting summit temperature and mean reaction temperature
- Direct calculation of reaction temperatures
- Several case studies
- Occam’s Razor