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ESPRO

CMP Process Training - Module 4

CMP Process Training - Module 4

Product description

CMP Process Training - Module 4:
Bulk polishing theory with the goal to apply a proper model for oxide and metal polish

  • Examples of ILD and metal polishing data
  • Preston plots vs. contour (Lim-Ashby) plots
  • High-level derivation and application of a simple tribochemical model
  • Mechanically-limited and chemically-limited extremes of the model
  • Heat transfer to contacting summits and the definition of “flash heating”
  • Analytical estimate of contacting summit temperature and mean reaction temperature
  • Direct calculation of reaction temperatures
  • Several case studies
  • Occam’s Razor

 

ESPRO

CMP Process Training - Module 4

Part of a 10 module course
A great, detailed overview of CMP equipment, materials, and processes
16 hours in total
Either a 2 full-day training (face-to-face) or 8 2-hour blocks once a week (remote training, 8 weeks total)

Specifications

Brand
ESPRO
Product Number
CMP-Training-Mod004
Status
Request information