esPRO’s CFRK Series CMP Slurry Capsule Filters are specially designed to provide efficient filtration while minimizing direct human contact with harmful and volatile solvents, making them ideal for handling corrosive and hazardous materials in CMP slurry applications. The unique design of the CFRK series reduces the gap between the filter housing and the filter element, significantly reducing fluid residue, saving materials, and lowering overall operational costs.

The CFRK series offers three different filter media options: HCB, PP3, and Glass Fiber, each tailored to suit different filtration needs. These filters are available in 5", 10", and 20" lengths, providing flexibility for various system configurations and flow rates.

With seven different removal ratings and a maximum working temperature of 80ºC, the CFRK series delivers reliable performance in demanding environments. The filters can operate under a maximum differential pressure of 0.8 MPa, ensuring long-lasting filtration even under high-pressure conditions.

The CFRK series is designed to optimize material usage, reduce residue, and minimize costs while maintaining safe and effective filtration of CMP slurry and other corrosive or volatile substances.