esPRO’s CFPR Capsule Filter is a compact and efficient filtration solution designed specifically for photoresist processing. The CFPR series is engineered to remove particles generated during photoresist use, helping to improve product yield and process efficiency. Its compact structure minimizes residual material and liquid, reducing waste while offering an integral design that allows for quick and safe filter replacements.

Manufactured, tested, and packaged in a cleanroom environment, the CFPR capsule filters ensure the highest levels of cleanliness, making them suitable for use in sensitive applications. These filters are ideal for small flow filtration requirements and come with a variety of media and capsule material options to meet different filtration needs.

The CFPR filter is available with three filter media options: PP, PTFE, and NF, and two capsule materials: PP for processes with a maximum working temperature of 40ºC, and PVDF for processes requiring temperatures up to 80ºC. The series also offers four different removal rating media to tailor the filtration efficiency to specific application requirements.

Designed for easy integration into photoresist processing systems, the CFPR series supports a maximum operating differential pressure of 0.4 MPa at 25ºC, ensuring reliable and consistent filtration performance.