ESPRO’s CFCMD Capsule Filter is specifically designed for CMP (Chemical Mechanical Planarization) slurry filtration, offering a compact structure and ease of operation. The CFCMD series provides exceptional filtration of impurities and gels in CMP slurry through its advanced gradient filtration system, effectively extending the filter’s service life.

This capsule filter features a two-port inlet and outlet design, ensuring seamless integration into existing filtration systems while maintaining efficient flow and performance.

Constructed entirely from polypropylene (PP), the CFCMD capsule filter is assembled using a hot-melt welding process, which eliminates the use of adhesives and ensures the cleanliness and integrity of the filtration system. The filter media employs PP/PP+ nanofiber membranes, leveraging ESPRO's patented spin nano fiber technology, which delivers superior filtration performance compared to conventional filter media.

Measuring 90mm in diameter and 206mm in length, the CFCMD filter is available with seven different removal ratings, making it adaptable to a wide range of filtration needs.

Operating at a maximum temperature of 55ºC and withstanding a maximum differential pressure of 0.6 MPa, the CFCMD series is ideal for high-demand CMP slurry applications.

The CFCMD Disposable Capsule Filter is engineered for reliability and longevity, providing a robust solution for maintaining cleanliness in CMP processes while ensuring efficient removal of contaminants and extended filter life.