FILTRATION

Photoresist Capsule Filters - CFTHE Three-hole Lithography

 

 

CFTHE Three-hole Lithography Capsule Filter

Number: Espro-CFTHE
Price on quote

 

 

 

 

 

 

 

 

 

Product description

The CFTH series is specially suitable for flat panel and lithography applications.
The CFTH series provide critical particle removal performance for pigment-dispersed color resists.

The built-in filter structure can minimize pollution. The compact and stable design makes it easy to install or modify existing tools. It can be replaced in less than one minute, without any tools or draining, minimizing dripping and leakage.

  • Filter media: PTFE/PP
  • Support: PP, HDPE
  • Sealing: FEP/Viton, EPDM
  • Capsule: HDPE
  • Max. working temp.: 40℃
  • Max. Operating DP: 0.27Mpa (25℃)