Our esPRO® Slurry Mixing Cabinets are designed to dilute, mix, and supply a combination of slurry and water. The system includes two individual cabinets: a slurry day tank and the slurry supply. The slurry mixing system is used to dilute slurry with water, mix it and supply it to CMP tools installed within the FAB using a loop line.
The built-in exhaustion system is designed in such a way that all harmful fumes are extracted from the work table. The exhaustion system consists of a manually adjustable throttle flap/grating and an outgoing air collection channel.
Mixing of the slurry can be controlled by a weight scale or flowmeters; in addition, a KxS Refractometer can be installed to measure the exact concentration in the loop and determine if the mixture is still within specification.
Together with the customer, we can align on available options and configure the preferred pumps, fittings, sensors, etc. The system can be customized according to the application and needs of the customer; we have a team of experts available to design and implement custom solutions.
Benefits
- Efficient mixing
- Separate switch cabinet with operator panel
- Separate level sensor “min” and “max/max”
- Automatic filling of the day tank after “day tank min” and “recirculation timer end”
- Status-light lamp including audio signal in case of issues
- Emergency machine off (EMO) on the front door
Features
- Compatible with PP and EPDM seals
- Housing Material: white PVC
- Piping material: PP
- CDA tubing: PTFE
- Safety pan for the collection of spilled chemicals
- Filling via pneumatically operated valves with Slurry and DI water
- Filling volumes adjustable in the software
- Recirculation/bypass line with connections on top per tank
- Separate venting
- Leakage sensor in the safety pan