esPRO’s PF3 and 015-series filter cartridges are specifically designed for point-of-use photoresist filtration, offering extremely low extractables to ensure optimal performance in sensitive applications. These 2.5” and 5” cartridges are ideal for filtering organic solvents such as benzene and dimethylbenzene, as well as corrosive fluids and wet process chemicals.

The PF3-series (hydrophobic) and 015-series (hydrophilic) are equipped with dual media PTFE/UPE membranes, providing compatibility with a wide range of liquid and gas applications. These filters offer superior chemical resistance, making them highly effective in applications where minimal contamination is essential, including G-line and I-line photoresists, as well as polyimide coatings.

Constructed with HDPE (high-density polyethylene) support, end caps, cage, and core, the PF3 and 015-series are built for durability in demanding environments. With a maximum working temperature of 70ºC, these filters are ideal for use in processes requiring reliable filtration under moderate heat.

The PF3 and 015-series cartridges deliver exceptional filtration performance, ensuring the highest level of cleanliness in photoresist processes and making them a reliable choice for industries requiring precise and efficient contaminant removal.