The Mavlipa G3 is a compact instrument capable of detecting abrasive particles as small as 80 nm in diameter over a wide range of concentrations ranging from a few particles per ml to over a billion particles per ml. The system combines advanced multi-sensor optical detection with innovative flow controls to enable industry-leading detection range without requiring pre-dilution. All components are compatible with CMP slurries which enables realtime data and the option to return the small sample volume for use if desired.
Features
- No dilution required
- Multi-Sensor Technology
- Suppression of background scattering
- Patented low/high flow operation
- Advanced Gen3 detection algorithms
- Integrated computer & software
Benefits
- Measures natural state of slurry and enables sample flow to return to loop if desired
- Concentration range: 9 orders of magnitude
- Enables analysis of opaque solutions, any type of CMP slurry without dilution
- Auto-switching to optimize measurement for slurry main mode and LPC portions of PSD
- No additional modeling or correction required
- Real-time data stream (display or output)