esPRO’s HGSSA-N Series Gas Filters are designed for high-pressure and high-temperature gas filtration in semiconductor applications, constructed from electronic grade 316L stainless steel. The HGSSA series offers both PFA and PTFE filter media options, providing excellent chemical resistance and high performance in high-flow gas filtration processes.

These filters feature uniform pore size, allowing for high-precision filtration with large flux and strong dirt interception capacity, ensuring effective filtration at high flow rates. The HGSSA filters are built to handle the rigorous demands of high-pressure gas filtration while maintaining reliability and efficiency.

The filter housing and vent are made from 316L stainless steel, with O-rings and gaskets available in EPDM, Viton, Silicone, or FFKM for enhanced chemical compatibility.

The filters are available in 5", 10", and 20" lengths, with a diameter of 89 mm and a drain size of 1/4" NPT.

The surface of the filter housing is treated with mechanical polishing and electrolytic polishing, achieving an internal polishing precision of 0.4 μm and an external finish of 0.6 μm, ensuring optimal cleanliness.

The HGSSA series can operate at a maximum working pressure of 2 MPa (20 bar) and a maximum working temperature of 130ºC, with a maximum flow rate of 5 m³/min per 10" filter. The series is available in two models: HGSSA-T and HGSSA-N, tailored to meet various filtration requirements.