esPRO’s GSSV Series Gas Filters are constructed from 316L electronic-grade stainless steel, specifically designed for high-temperature and high-pressure gas filtration in semiconductor processes. These filters offer high flow rates, low pressure drop, and excellent chemical compatibility, making them suitable for compressed air, process gas, toxic gas, dry gas, and dewatering applications.
The GSSV series uses hydrophobic PTFE as the filter media, supported by PFA 440HP for enhanced chemical resistance and durability. The housing features a high-purity surface finish with an interior roughness of ≤ 0.18 μm / 7 μin Ra, ensuring maximum cleanliness in critical environments. The filters come standard with an E-FKM O-ring, with FFKM as an optional upgrade for more demanding chemical applications.
The GSSV series can handle a maximum working temperature of 170ºC and a maximum operating differential pressure of 0.7 MPa forward, ensuring reliable performance in high-stress environments.
Designed for flexibility and adaptability in semiconductor and industrial gas filtration, the GSSV filters are built to meet the stringent demands of modern processing environments, combining superior performance with the highest standards of cleanliness.