esPRO’s GSSS Series Gas Filters are built with 316L electronic-grade stainless steel, specifically designed for high-temperature and high-pressure gas filtration in semiconductor processes. These filters offer high flow rates, low pressure drop, and excellent chemical compatibility, making them ideal for demanding gas filtration applications in industrial and semiconductor environments.
The GSSS series utilizes metal sintered film as the filter media, with a 0.3µm removal rating, ensuring durability and excellent performance in extreme conditions. The filters are designed to operate at a maximum working temperature of 400ºC and can handle a maximum operating differential pressure of 10.4 MPa forward, making them suitable for the most rigorous gas filtration requirements.
All GSSS series filters are manufactured in a cleanroom environment under ISO9001-certified oversight, ensuring the highest levels of product cleanliness and quality. This meticulous production process ensures that the GSSS series meets the stringent demands of semiconductor gas filtration while maintaining process integrity and safety.