esPRO’s GSSL Series Gas Filters are built with 316L electronic-grade stainless steel and are designed for high-temperature and high-pressure gas filtration in semiconductor processes. These filters offer high flow rates, low pressure drop, and excellent chemical compatibility, making them suitable for applications such as compressed air, process gas, toxic gas, dry gas, and dewatering.

The GSSL series utilizes hydrophobic PTFEas the filter media, supported by PFA 440HP, ensuring durability and resistance to harsh chemicals. The housing is designed with a high-purity surface finish, featuring an interior roughness of ≤ 0.18 μm / 7 μin Ra, optimizing cleanliness for critical environments. The standard sealing material is E-FKM, with an option to upgrade to FFKM for more demanding applications.

The GSSL series operates under a maximum working temperature of 170ºC and can withstand a maximum operating differential pressure of 0.55 MPa forward, making it ideal for rigorous industrial and semiconductor gas filtration processes.

With a combination of superior performance and high chemical compatibility, the GSSL series ensures reliable and efficient gas filtration, meeting the stringent requirements of semiconductor manufacturing and other industrial applications.