esPRO’s GSSG Series Gas Filters are designed with 316L electronic-grade stainless steel housing, specifically engineered for high-temperature and high-pressure gas filtration in IGS (Integrated Gas System) applications. These filters are optimized for high flow rates, low pressure drop, and excellent chemical compatibility, making them ideal for demanding semiconductor processes.

The GSSL series uses hydrophobic PTFE filter media, providing outstanding durability and resistance to chemicals in harsh environments. The filter housing is finished with a high-purity interior surface, achieving a roughness of ≤ 0.18 μm / 7 μin Ra, ensuring optimal cleanliness for critical filtration applications.

These filters can operate at a maximum working temperature of 400ºC and handle a maximum operating differential pressure of 10.4 MPa forward, making them suitable for the most demanding IGS applications in semiconductor manufacturing.

With its high performance under extreme conditions, the GSSG series delivers reliable and efficient gas filtration, ensuring superior process integrity and safety in IGS systems.