The GSSM and GSS gas filter housing are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
The filters feature high flow rates, low pressure drop and excellent chemical compatibility.
- Filter media: Hydrophobic PTFE
- Housing: 316L stainless steel
- Support: PFA
- Max. Work temp.: 170℃
- Max. Operating DP: Forward 0.55Mpa, Reverse 0.34Mpa