ESPRO’s T-PFA, LPFA, NPFA, and BPFA disposable filter modules are innovative solutions that combine the functionality of a filter housing and cartridge into a single, disposable assembly. Constructed from high-purity PFA materials with a PTFE membrane, these filters are specifically designed for high-temperature and critical applications, making them ideal for semiconductor and other industries requiring extreme chemical compatibility and cleanliness.

The T-PFA, LPFA, NPFA, and BPFA models feature an all-fluorine structure, which ensures superior chemical compatibility and ultra-low metal extractables, extending filter life while maintaining purity. These filters are rigorously tested for integrity to meet the demanding requirements of semiconductor manufacturing. The prewet packaging reduces pre-operation time, allowing for faster system setup and minimizing downtime.

With their disposable design, these filters eliminate the need for separate housings and cartridges, simplifying system design, reducing installation time, and enhancing leak proofness. This all-in-one assembly provides a more efficient filtration process while reducing the risk of contamination and equipment maintenance.

Applications for these filters include a wide range of aggressive chemicals such as H2SO4, H3PO4, HNO3, HCl, NH4OH, H2O2, TMAH, and other semiconductor process chemicals like SC1, SC2, and SPM.

Operating at temperatures up to 180ºC and withstanding a maximum working differential pressure of 0.42 MPa at 25ºC, the ESPRO T-PFA, LPFA, NPFA, and BPFA filter modules offer exceptional reliability and performance in the most challenging chemical environments, providing a superior filtration solution for industries that require both efficiency and durability.

Applications

H2SO4, H3PO4, HNO3, HCL, NH4OH, H2O2, TMAH, SC1, SC2, SPM, etc