FILTRATION
ESPRO

CMP Process Training - Module 8

CMP Process Training - Module 8

Product description

CMP Process Training - Module 8:
Reactor design and modeling

  • The pad-slurry-wafer interface as a chemical engineering reactor
  • The residence time distribution (RTD) technique
  • Definitions, derivations and applications of slurry mean residence time, dispersion number, turnover ratio and slurry utilization efficiency
  • Case studies re: the effects of flow rate, groove geometry, polish time, pressure and sliding velocity on the above (and key polishing outcomes)

 

ESPRO

CMP Process Training - Module 8

Part of a 10 module course
A great, detailed overview of CMP equipment, materials, and processes
16 hours in total
Either a 2 full-day training (face-to-face) or 8 2-hour blocks once a week (remote training, 8 weeks total)

Specifications

Brand
ESPRO
Product Number
CMP-Training-Mod008
Status
Request information