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CMP Process Training - Module 6

CMP Process Training - Module 6

Product description

CMP Process Training - Module 6:
Tribology of CMP and nano-particle settling in slurries

Tribology in CMP and the Components of COF

  • Stribeck curves
  • Sommerfeld and pseudo-Sommerfeld numbers
  • Stribeck+ curves
  • Corrections regarding the two curves noted above
  • Force cluster plots and their applications in CMP
  • Directivity curves
  • Kinetic curves

Criteria for Nano-Particle Settling in CMP

  • Stokes number and estimation of abrasive nano-particle settling tendencies
  • Slurry flow and residence times in grooves
  • Terminal and settling velocities of particles in fluids

 

ESPRO

CMP Process Training - Module 6

Part of a 10 module course
A great, detailed overview of CMP equipment, materials, and processes
16 hours in total
Either a 2 full-day training (face-to-face) or 8 2-hour blocks once a week (remote training, 8 weeks total)

Specifications

Brand
ESPRO
Product Number
CMP-Training-Mod006
Status
Request information