CMP Process Training - Module 6:
Tribology of CMP and nano-particle settling in slurries
Tribology in CMP and the Components of COF
- Stribeck curves
- Sommerfeld and pseudo-Sommerfeld numbers
- Stribeck+ curves
- Corrections regarding the two curves noted above
- Force cluster plots and their applications in CMP
- Directivity curves
- Kinetic curves
Criteria for Nano-Particle Settling in CMP
- Stokes number and estimation of abrasive nano-particle settling tendencies
- Slurry flow and residence times in grooves
- Terminal and settling velocities of particles in fluids