CMP Process Training - Module 5:
Pads
- Bulk and surface mechanical properties of hard pads such as D100 and IC1000
- Surface water absorption due to exposure to ultra-pure water (UPW)
- Pad surface mechanical response to loading and unloading of dead weights
- Role and effect of grooves – Some examples
- Characterization of pad surfaces with confocal microscopy
- Surface height probability density functions
- Pad summits and their characteristics
- Pad-wafer contact area measurements
- Selected case studies
- A new idea