CMP Process Training - Module 3:
Review of selected experimental evidence with the goal to introduce and discuss observations that form the basis for a conceptual understanding of CMP phenomena and CMP models
- Mainstream CMP tools and associated mechanics
- Basic observations of bulk pad structure and pad topography
- Pad bulk mechanical properties vs. surface mechanical properties
- Thermal measurements
- Partial lubrication of contacting asperities
- Shear and normal force measurements
- Vibrational measurements
- Polisher impact hammer studies and harmonics
- Motor current measurements
- Use of frictional and vibrational data for EPD (STI & Cu)