esPRO’s CFCMP CMP Capsule Filter is specifically designed for CMP (Chemical Mechanical Planarization) slurry filtration, offering a compact structure and ease of operation. The CFCMP series delivers exceptional filtration performance, targeting impurities and gels in CMP slurry through its gradient filtration system, which effectively extends service life by improving contaminant retention.

This model features a four-port design—including inlet, outlet, drain, and vent ports—allowing for flexible integration into CMP filtration systems while maintaining efficient flow and simplified maintenance.

Constructed entirely from polypropylene (PP), the CFCMP capsule filter utilizes a hot-melt welding process, ensuring no adhesives are used, which helps to maintain filtration cleanliness and integrity. The filter media incorporates PP/PP+ nanofiber membranes, leveraging ESPRO’s patented spin nano fiber technology, which provides superior filtration efficiency and enhanced durability in high-demand applications.

With a 71mm diameter and available in 206mm length, this capsule filter offers seven different removal ratings to accommodate diverse filtration requirements. Operating at a maximum temperature of 55ºC and withstanding a maximum differential pressure of 0.6 MPa, the CFCMP filter is ideal for high-demand CMP slurry applications.